comments:
I ended up using this extractor set: https://www.amazon.com/dp/B07YBWNCZV I would tap one in, turn it with a breaker bar until it dug in and stripped, then tap the next one up in. I think after the third one, it finally broke free. I think I also used a 20V impact gun, but it had some extensions on it that kind of killed the impact torque, and I think I may as well have used the breaker bar with a cheater. Good luck, OP. FWIW, I replaced mine with a Lexus one that has a six point "bolt head" instead of the allen one. Also, some anti-seize on the way in for both drain and fill.
better bolt extractor is probably the easiest. use a little penetrant (don't get it in the engine). project farm liked this one and it's cheap: www.amazon.com/dp/B07YBWNCZV alternately, drilling it out and retapping and using a new bolt with the right thread specs nuclear: replace the entire timing cover.